Design of Lithography Reticle Stage Micropositioner Leveling Control System

HE Liang-chen，SONG Yue，LIU Yang，LIU Yang
（School of Astronautics，Harbin Institute of Technology，Harbin 150001，China）
Abstract：Considering the speediness，accuracy and stability requirements of lithography micropositioner leveling motion relative to the silicon，the paper proposed the design and implementation method for 3?鄄DOF leveling control system based on DSP and FPGA. Using DSP TMS320C6414 of TI and EP2S60F102014N of Altera as main controller and slave controller respectively，the paper elaborated the design of signal acquisition module based on programmable device EP2C5Q208C8N，sensor module and drive circuit，etc，and the stability，rapidity，accuracy of the whole control system was proved by experiments.
Key words：3?鄄DOF leveling control；DSP TMS320C6414；reticle stage；lithography