Development of the Multi-mode Flow Controller Based on Non-inductive Detection Technology

SHI Shou-yong1，2，ZHU Jing2，YU Jian-ming2
（1.The Engineering Technology Research and Development Center of Electronic Products Equipment Manufacturing of Jiangsu Province，Huai’an 223003，China；2.Department of Electrical Engineering，Huai’an College of Information and Technology，Huai’an 223003，China）
Abstract：The corrosion of the chemical fluid makes the flow sensor precision drop or damaged，so the enterprise must change it regularly. This paper developed a multi-mode flow controller based on SCM making use of non-flow sensor detection technology. It put forward three methods of detecting fluid based on analyzing the non-inductive measuring principle，and realized the detection and control of the fluid measurement through the design of hardware and software，and the measuring precisions of the fluid were all controlled under 1%. Practice has proved that the flow controller is cost-effective with easy operation and maintenance as well as stable and reliable operation，and thus has broad application prospect in the market.